DEPENDENCE OF STRUCTURAL AND COMPOSITIONAL CHARACTERISTICS OF CHROMIUM METAL-FILMS AS A FUNCTION OF DEPOSITION RATE DURING THE FABRICATION OF METAL-INSULATOR SEMICONDUCTOR SOLAR-CELLS

被引：6

作者：

MOHARRAM, AH ^{[1
]}

PANAYOTATOS, P ^{[1
]}

YEH, JL ^{[1
]}

LALEVIC, B ^{[1
]}

COSANDEY, F ^{[1
]}

机构：

[1] RUTGERS STATE UNIV,COLL ENGN,DEPT MECH & MAT SCI,PISCATAWAY,NJ 08854

来源：

THIN SOLID FILMS | 1985年 / 129卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(85)90091-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：25 / 34

页数：10

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