PROPERTIES OF P+ MICROCRYSTALLINE FILMS OF SIC-H DEPOSITED BY CONVENTIONAL RF-GLOW DISCHARGE

被引：56

作者：

GOLDSTEIN, B ^{[1
]}

DICKSON, CR ^{[1
]}

CAMPBELL, IH ^{[1
]}

FAUCHET, PM ^{[1
]}

机构：

[1] PRINCETON UNIV,DEPT ELECT ENGN,PRINCETON,NJ 08544

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 26期

关键词：

D O I：

10.1063/1.100193

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2672 / 2674

页数：3

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