THE CLIFFORD PATERSON LECTURE, 1986 - LIMITS OF THIN-FILM MICROFABRICATION

被引：7

作者：

BROERS, AN

机构：

来源：

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES | 1988年 / 416卷 / 1850期

关键词：

D O I：

10.1098/rspa.1988.0024

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：1 / +

页数：1

共 64 条

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[2]

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[3]

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[4]

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[7]

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[8]

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[9]

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[10]

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