SURFACE-ROUGHNESS INTERPRETATION OF ELLIPSOMETER MEASUREMENTS USING GENERALIZED MAXWELL GARNETT THEORY

被引：28

作者：

MARTON, JP

CHAN, EC

机构：

[1] WELWYN CANADA LTD,1255 BRYDGES ST,LONDON,ONTARIO,CANADA

[2] MCMASTER UNIV,INST MAT RES,HAMILTON,ONTARIO,CANADA

[3] UNIV WESTERN ONTARIO,FAC ENGN SCI,LONDON,ONTARIO,CANADA

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 11期

关键词：

D O I：

10.1063/1.1663174

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5008 / 5014

页数：7

共 11 条

[1] ELLIPSOMETER STUDY OF ANOMALOUS ABSORPTION IN VERY THIN DIELECTRIC FILMS ON EVAPORATED METALS
BASHARA, NM
PETERSON, DW
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1966, 56 (10) : 1320 - &
[2] GENERALIZED MAXWELL GARNETT EQUATIONS FOR ROUGH SURFACES
CHAN, EC
MARTON, JP
[J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (11) : 5004 - 5007
[3] INTERNAL REFLECTION ELLIPSOMETRY FOR METAL DEPOSITS
CHAN, EC
MARTON, JP
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (10) : 4027 - &
[4] INFLUENCE OF SURFACE-ROUGHNESS ON TRANSMISSION AND REFLECTANCE SPECTRA OF ADSORBED SPECIES
DIGNAM, MJ
MOSKOVIT.M
[J]. JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS II, 1973, 69 (01): : 65 - 78
[5] EFFECTS OF VACUUM DEPOSITION CONDITIONS ON ELLIPSOMETRIC PARAMETERS, OPTICAL-CONSTANTS, AND REFLECTANCE OF ULTRAPURE ALUMINUM FILMS
HALFORD, JH
CHIN, FK
NORMAN, JE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1973, 63 (07) : 786 - 792
[6] HEAVENS OS, 1965, OPTICAL PROPERTIES T, P93
[7] Jackson J. D., 1962, CLASSICAL ELECTRODYN
[8] INTERPRETATION OF ELLIPSOMETRIC OBSERVATIONS OF ABSORBED OXYGEN IN NIOBIUM
LEDERICH, RJ
BELLINA, JJ
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (12) : 1697 - +
[9] ELLIPSOMETRIC STUDY OF NI-P FILM SURFACES
MARTON, JP
CHAN, EC
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (04) : 1681 - &
[10] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY
MCCRACKIN, FL
PASSAGLIA, E
STROMBERG, RR
STEINBERG, HL
[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +

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