THE ROLE OF HYDROGEN IN THE NITRIDATION OF SILICON POWDER COMPACTS

被引：32

作者：

DERVISBEGOVIC, H

RILEY, FL

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1981年 / 16卷 / 07期

关键词：

D O I：

10.1007/BF00540643

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1945 / 1955

页数：11

共 26 条

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[2]

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BOYER, SM ;

MOULSON, AJ .

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[6]

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CAMPOSLORIZ, D ;

HOWLETT, SP ;

RILEY, FL ;

YUSAF, F .

JOURNAL OF MATERIALS SCIENCE, 1979, 14 (10) :2325-2334

[8] COMBINED EFFECTS OF FE AND H-2 ON KINETICS OF SILICON NITRIDATION [J].

DAWSON, WM ;

MOULSON, AJ .

JOURNAL OF MATERIALS SCIENCE, 1978, 13 (10) :2289-2290

[9] INFLUENCE OF IRON AND HYDROGEN IN THE NITRIDATION OF SILICON [J].

DERVISBEGOVIC, H ;

RILEY, FL .

JOURNAL OF MATERIALS SCIENCE, 1979, 14 (05) :1265-1268

[10]

GIACELLO A, 1980, SCI CERAM, V10, P377

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