MATERIALS INTERACTION IN PB-SN/NI-P/AL AND PB-SN/NI-B/AL SOLDER BUMPS ON CHIPS

被引:18
作者
LEE, CY
LIN, KL
机构
[1] Department of Materials Engineering, National Cheng Kung University, Tainan
关键词
D O I
10.1016/0040-6090(93)90411-H
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Electroless deposits Ni-P and Ni-B were investigated for their feasibility as a diffusion barrier between solder and Al pad. Solder was selectively deposited on the aluminum pad by dipping. With the aid of scanning Auger microscopy (SAM) and X-ray diffraction (XRD), it was found that Ni3Sn4 is the only phase formed between the electroless Ni-P or Ni-B deposit and the solder after heat treatment. The phosphorus content of the electroless Ni-P deposit did not tend to affect the barrier performance of the deposit. However, the electroless Ni-B deposit is effective as a diffusion barrier only when the boron content is less than 3 wt.%. The tin of the solder can penetrate the electroless Ni-B layer at higher boron contents.
引用
收藏
页码:63 / 75
页数:13
相关论文
共 23 条
[1]  
BOWER RW, 1973, APPL PHYS LETT, V23, P99, DOI 10.1063/1.1654823
[2]   DIFFUSION IN A PD-CU-SI METALLIC GLASS [J].
CHEN, HS ;
KIMERLING, LC ;
POATE, JM ;
BROWN, WL .
APPLIED PHYSICS LETTERS, 1978, 32 (08) :461-463
[3]   KINETICS OF COMPOUND FORMATION IN THIN-FILM COUPLES OF AL AND TRANSITION-METALS [J].
HOWARD, JK ;
LEVER, RF ;
SMITH, PJ ;
HO, PS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :68-71
[4]   SOLDER BUMP FORMATION USING ELECTROLESS PLATING AND ULTRASONIC SOLDERING [J].
INABA, M ;
YAMAKAWA, K ;
IWASE, N .
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1990, 13 (01) :119-123
[5]   SOLDER CONNECTIONS WITH A NI BARRIER [J].
KELLER, HN .
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1986, 9 (04) :433-439
[6]   STRUCTURAL-CHANGES INDUCED BY HEATING IN ELECTROLESS NICKEL PHOSPHORUS ALLOYS [J].
MAI, QX ;
DANIELS, RD ;
HARPALANI, HB .
THIN SOLID FILMS, 1988, 166 (1-2) :235-247
[7]  
Masui K., 1986, Metal Finishing, V84, P33
[8]   EFFECT OF METALLOIDAL ELEMENTS ON CORROSION-RESISTANCE OF AMORPHOUS IRON - CHROMIUM-ALLOYS [J].
NAKA, M ;
HASHIMOTO, K ;
MASUMOTO, T .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1978, 28 (03) :403-413
[9]   TI AND V LAYERS RETARD INTERACTION BETWEEN AL FILMS AND POLYCRYSTALLINE SI [J].
NAKAMURA, K ;
LAU, SS ;
NICOLET, MA ;
MAYER, JW .
APPLIED PHYSICS LETTERS, 1976, 28 (05) :277-280
[10]  
NCOLET MA, 1981, J VAC SCI TECHNOL, V9, P786