IDENTIFICATION OF AN INTERSTITIAL CARBON-INTERSTITIAL OXYGEN COMPLEX IN SILICON

被引：141

作者：

TROMBETTA, JM

WATKINS, GD

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 14期

关键词：

D O I：

10.1063/1.98754

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1103 / 1105

页数：3

共 18 条

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