OPTICAL-PROPERTIES AND ENVIRONMENTAL STABILITY OF OXIDE COATINGS DEPOSITED BY REACTIVE SPUTTERING

被引：121

作者：

EDLOU, SM ^{[1
]}

SMAJKIEWICZ, A ^{[1
]}

ALJUMAILY, GA ^{[1
]}

机构：

[1] JET PROP LAB, PASADENA, CA 91109 USA

来源：

APPLIED OPTICS | 1993年 / 32卷 / 28期

关键词：

THIN FILMS; SPUTTERING; INTERFERENCE; OPTICAL COATINGS; OPTICAL FILTERS; MATERIALS; METAL OXIDES; OPTICAL PROPERTIES;

D O I：

10.1364/AO.32.005601

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Refractory metal-oxide coatings are deposited by reactive dc magnetron sputtering in an oxygen environment. The optical constants and the environmental stability of silicon oxide, aluminium oxide, hafnium oxide, zirconium oxide, tantalum oxide, titanium oxide, and a blend of hafnium oxide with silicon oxide are investigated. Properties of both single-layer and multilayer interference filters are examined.

引用

页码：5601 / 5605

页数：5

共 13 条

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