CARRIER CONDUCTION IN ULTRATHIN NITRIDED OXIDE-FILMS

被引：68

作者：

SUZUKI, E ^{[1
]}

SCHRODER, DK ^{[1
]}

HAYASHI, Y ^{[1
]}

机构：

[1] ELECTROTECH LAB,SAKURA,IBARAKI 305,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 10期

关键词：

D O I：

10.1063/1.337568

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3616 / 3621

页数：6

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