DOSE-RATE EFFECT OF THE PREFERENTIAL SPUTTERING OF COPPER-NICKEL-ALLOYS BY ARGON ION AT ELEVATED-TEMPERATURES

被引:11
作者
SHIMIZU, H [1 ]
ONO, M [1 ]
KOYAMA, N [1 ]
ISHIDA, Y [1 ]
机构
[1] UNIV TOKYO,INST IND SCI,MINATO KU,TOKYO 106,JAPAN
关键词
D O I
10.1143/JJAP.19.L567
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L567 / L570
页数:4
相关论文
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