SEEDED AND LIMITED SEEDING REGROWTH OF SI OVER SIO2 BY CW LASER ANNEALING

被引：18

作者：

MAGEE, TJ ^{[1
]}

PALKUTI, LJ ^{[1
]}

ORMOND, R ^{[1
]}

LEUNG, C ^{[1
]}

GRAHAM, S ^{[1
]}

机构：

[1] AMDAHL CORP,SUNNYVALE,CA 94086

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 04期

关键词：

D O I：

10.1063/1.92332

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：248 / 250

页数：3

相关论文

共 7 条

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[6] PALKUTI LJ, 1980, 30TH P EL COMP C, P37
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