ALUMINUM DOPED ZINC-OXIDE THIN-FILMS DEPOSITED BY ION-BEAM SPUTTERING

被引：23

作者：

RUTH, M ^{[1
]}

TUTTLE, J ^{[1
]}

GORAL, J ^{[1
]}

NOUFI, R ^{[1
]}

机构：

[1] SOLAR ENERGY RES INST,1617 COLE BLVD,GOLDEN,CO 80401

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 96卷 / 02期

关键词：

D O I：

10.1016/0022-0248(89)90534-4

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：363 / 368

页数：6

共 13 条

[1] TRANSPARENT CONDUCTORS - A STATUS REVIEW
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MAJOR, S
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[J]. THIN SOLID FILMS, 1983, 102 (01) : 1 - 46
[2] DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS FROM MEASUREMENTS OF REFLECTANCE AND TRANSMITTANCE AT NORMAL INCIDENCE
DENTON, RE
TOMLIN, SG
CAMPBELL, RD
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1972, 5 (04) : 852 - &
[3] INFLUENCE OF DEFECTS ON THE ELECTRONIC-STRUCTURE OF ZINC-OXIDE SURFACES
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LAMPE, U
[J]. PHYSICAL REVIEW B, 1980, 22 (12): : 6447 - 6462
[4] JIN ZC, 1987, SPIE, V823, P28
[5] HIGHLY TRANSPARENT AND CONDUCTING ZINC-OXIDE FILMS DEPOSITED BY ACTIVATED REACTIVE EVAPORATION
LAU, WS
FONASH, SJ
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1987, 16 (03) : 141 - 149
[6] ANNEALING STUDIES OF UNDOPED AND INDIUM-DOPED FILMS OF ZINC-OXIDE
MAJOR, S
BANERJEE, A
CHOPRA, KL
[J]. THIN SOLID FILMS, 1984, 122 (01) : 31 - 43
[7] THE STABILITY OF ZINC-OXIDE TRANSPARENT ELECTRODES FABRICATED BY RF MAGNETRON SPUTTERING
MINAMI, T
NANTO, H
SHOOJI, S
TAKATA, S
[J]. THIN SOLID FILMS, 1984, 111 (02) : 167 - 174
[8] GROUP-III IMPURITY DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
MINAMI, T
SATO, H
NANTO, H
TAKATA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (10): : L781 - L784
[9] THE PREPARATION AND SOME PROPERTIES OF TRANSPARENT CONDUCTING ZNO FOR USE IN SOLAR-CELLS
MORGAN, JH
BRODIE, DE
[J]. CANADIAN JOURNAL OF PHYSICS, 1982, 60 (10) : 1387 - 1390
[10] ELECTRICAL AND OPTICAL-PROPERTIES OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FOR TRANSPARENT ELECTRODE APPLICATIONS
NANTO, H
MINAMI, T
SHOOJI, S
TAKATA, S
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 1029 - 1034

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