COMPARISON OF AUGER SIGNALS MEASURED USING DIFFERENTIAL AND INTEGRAL AUGER-SPECTRA FROM C AND O ADSORBED ON W

Comparison was made experimentally with carbon and oxygen atoms on tungsten between the widely used peak-to-peak height measurements in dEN(E)/dE mode spectra, A, and the rarely used Auger peak heights and areas in EN(E) mode spectra, H and S, respectively, as measures of the signal in Auger electron spectroscopy. The proportionality between A and S was found to hold or not depending on whether chemical changes of the elements did not or did occur, respectively. As a quantitative example, carbide was found to have A-values about 3. 5 times larger than graphite for the same atomic concentration. For carbon, the H-values gave better indications of concentration than A. An example is presented in which the observation of an A vs S relation provides a means to detect the chemical change of specimens more sensitively than by observing Auger peak shapes.