CHARACTERIZATION OF RF-SPUTTERED ZIRCONIA COATINGS

被引：17

作者：

IWAMOTO, N

MAKINO, Y

KAMAI, M

机构：

来源：

THIN SOLID FILMS | 1987年 / 153卷

关键词：

D O I：

10.1016/0040-6090(87)90185-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：233 / 242

页数：10

共 15 条

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