DESIGN CONSIDERATIONS AND PRELIMINARY CHARACTERIZATIONS OF A KILOWATT-PLUS MICROWAVE-INDUCED PLASMA

被引：25

作者：

CULL, KB ^{[1
]}

CARNAHAN, JW ^{[1
]}

机构：

[1] NO ILLINOIS UNIV,DEPT CHEM,DE KALB,IL 60115

来源：

APPLIED SPECTROSCOPY | 1988年 / 42卷 / 06期

关键词：

D O I：

10.1366/0003702884430263

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1061 / 1065

页数：5

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