REACTIVE ION ETCHING DAMAGE TO GAAS-LAYERS WITH ETCH STOPS

被引：56

作者：

KNOEDLER, CM

OSTERLING, L

SHTRIKMAN, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 05期

关键词：

D O I：

10.1116/1.584217

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1573 / 1576

页数：4

共 22 条

[1] REACTIVE ION-ETCHING-INDUCED DAMAGE IN SILICON USING SF6 GAS-MIXTURES [J].

ARORA, BM ;

PINTO, R ;

BABU, RS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (04) :876-882

[2] DONOR NEUTRALIZATION IN GAAS(SI) BY ATOMIC-HYDROGEN [J].

CHEVALLIER, J ;

DAUTREMONTSMITH, WC ;

TU, CW ;

PEARTON, SJ .

APPLIED PHYSICS LETTERS, 1985, 47 (02) :108-110

[3] PASSIVATION OF DEEP LEVEL DEFECTS IN MOLECULAR-BEAM EPITAXIAL GAAS BY HYDROGEN PLASMA EXPOSURE [J].

DAUTREMONTSMITH, WC ;

NABITY, JC ;

SWAMINATHAN, V ;

STAVOLA, M ;

CHEVALLIER, J ;

TU, CW ;

PEARTON, SJ .

APPLIED PHYSICS LETTERS, 1986, 49 (17) :1098-1100

[4] ION-BEAM DAMAGE EFFECTS DURING THE LOW-ENERGY CLEANING OF GAAS [J].

GHANDHI, SK ;

KWAN, P ;

BHAT, KN ;

BORREGO, JM .

ELECTRON DEVICE LETTERS, 1982, 3 (02) :48-50

[5] RADIATION-DAMAGE OF GALLIUM-ARSENIDE INDUCED BY REACTIVE ION ETCHING [J].

HARA, T ;

SUZUKI, H ;

SUGA, A ;

TERADA, T ;

TOYODA, N .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (10) :4109-4113

[6] TUNNELING HOT-ELECTRON TRANSFER AMPLIFIER - A HOT-ELECTRON GAAS DEVICE WITH CURRENT GAIN [J].

HEIBLUM, M ;

THOMAS, DC ;

KNOEDLER, CM ;

NATHAN, MI .

APPLIED PHYSICS LETTERS, 1985, 47 (10) :1105-1107

[7] SELECTIVE DRY ETCHING OF ALGAAS-GAAS HETEROJUNCTION [J].

HIKOSAKA, K ;

MIMURA, T ;

JOSHIN, K .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (11) :L847-L850

[8] ANALYTIC APPROXIMATIONS FOR FERMI ENERGY OF AN IDEAL FERMI GAS [J].

JOYCE, WB ;

DIXON, RW .

APPLIED PHYSICS LETTERS, 1977, 31 (05) :354-356

[9] RAMAN-SCATTERING STUDY OF PLASMA-ETCHING DAMAGE IN GAAS [J].

KIRILLOV, D ;

COOPER, CB ;

POWELL, RA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (06) :1316-1318

[10]

KITTEL C, 1980, THERMAL PHYSICS, P366

← 1 2 3 →