HIGH-SPEED SELF-ALIGNED GAINP/GAAS HBBTS

被引:13
作者
LEIER, H [1 ]
MARTEN, A [1 ]
BACHEM, KH [1 ]
PLETSCHEN, W [1 ]
TASKER, P [1 ]
机构
[1] FRAUNHOFER INST APPL SOLID STATE PHYS,W-7800 FREIBURG,GERMANY
关键词
SEMICONDUCTOR DEVICES AND MATERIALS; MICROWAVE DEVICES; HETEROJUNCTION BIPOLAR TRANSISTORS;
D O I
10.1049/el:19930580
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High speed selfaligned Ga0.5In0.5P/GaAs hole barrier bipolar transistors (HBBTs) with a 60 nm carbon doped base layer (p = 6.5 x 10(19) cm-3) and a 20 nm undoped GaInP barrier have been fabricated. The devices show maximum small signal current gains around 30, independent of emitter size. A current gain cutoff frequency of f(T) = 95 GHz and power pin cutoff frequency of f(max) = 110 GHz are reported for 1.5 x 10 mum2 and 2 x 1.5 x 10 mum2 devices, respectively. These results represent the best microwave performance yet reported for Ga0.5In0.5 P/GaAs based HBTs.
引用
收藏
页码:868 / 870
页数:3
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