SMALL AREA INGAP EMITTER CARBON DOPED GAAS BASE HBTS GROWN BY MOMBE

被引:23
作者
REN, F
ABERNATHY, CR
PEARTON, SJ
LOTHIAN, JR
CHU, SNG
WISK, PW
FULLOWAN, TR
TSENG, B
CHEN, YK
机构
[1] AT&T Bell Laboratories, Murray Hill
关键词
TRANSISTORS; BIPOLAR DEVICES;
D O I
10.1049/el:19921447
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High performance selfaligned InGaP/GaAs HBTs are reported. SIMS and TEM analysis indicate the presence of clean and abrupt InGaP/GaAs interfaces which are reflected in excellent DC performance. Using a base layer with a sheet resistance of 135 OMEGA/square, a DC current gain of 25 was obtained for 2 x 5 mum2 devices. Both cutoff frequency f(t) and maximum frequency of oscillation f(max) are measured above 70 GHz. These are the highest values yet reported for HBTs containing InGaP.
引用
收藏
页码:2250 / 2252
页数:3
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