ROOM-TEMPERATURE VISIBLE LUMINESCENCE FROM SILICON NANOCRYSTALS IN SILICON IMPLANTED SIO2 LAYERS

被引：286

作者：

MUTTI, P

GHISLOTTI, G

BERTONI, S

BONOLDI, L

CEROFOLINI, GF

MEDA, L

GRILLI, E

GUZZI, M

机构：

[1] IST GUIDO DONEGANI SPA,I-28100 NOVARA,ITALY

[2] UNIV MILAN,DIPARTIMENTO FIS,I-20133 MILAN,ITALY

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 07期

关键词：

D O I：

10.1063/1.113408

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report the observation of visible-light emission at room temperature from high fluence (0.3-3×1017 cm-2) Si+ implanted thermal SiO2 layers grown on silicon substrates. Significant blue-light emission and an intense broad luminescent band with a peak beyond 750 nm are observed after annealing at high temperature (T≥1000°C). The red-light emission, present only in the highest fluence implant, is attributed to the luminescence emitted from silicon nanocrystals produced by silicon precipitation. The presence of silicon nanocrystals is confirmed by transmission electron microscopy. Significant blue-light emission is visible after thermal annealing in the 1×1017cm-2 fluence implant. The peak position shifts from 490 to 540 nm by increasing the annealing cycles temperature. © 1995 American Institute of Physics.

引用

页码：851 / 853

页数：3

共 18 条

[1] EXCITONS IN SILICON NANOSTRUCTURES
ALLAN, G
DELERUE, C
LANNOO, M
[J]. JOURNAL OF LUMINESCENCE, 1993, 57 (1-6) : 239 - 242
[2] BRANDT MS, 1993, SOLID STATE COMMUN, V86, P543
[3] OPTICAL-PROPERTIES OF POROUS SILICON - A 1ST-PRINCIPLES STUDY
BUDA, F
KOHANOFF, J
PARRINELLO, M
[J]. PHYSICAL REVIEW LETTERS, 1992, 69 (08) : 1272 - 1275
[4] SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS
CANHAM, LT
[J]. APPLIED PHYSICS LETTERS, 1990, 57 (10) : 1046 - 1048
[5] QUANTUM CONFINEMENT IN SI NANOCRYSTALS
DELLEY, B
STEIGMEIER, EF
[J]. PHYSICAL REVIEW B, 1993, 47 (03): : 1397 - 1400
[6] FATHAUER RW, 1991, MATER RES SOC S P, V256, P165
[7] IYER SS, 1991, MATER RES SOC S P, V256, P1
[8] VISIBLE PHOTOLUMINESCENCE FROM SI MICROCRYSTALLINE PARTICLES
KAWAGUCHI, T
MIYAZIMA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (2B): : L215 - L217
[9] EVIDENCE THAT BLUE LUMINESCENCE OF OXIDIZED POROUS SILICON ORIGINATES FROM SIO2
KONTKIEWICZ, AJ
KONTKIEWICZ, AM
SIEJKA, J
SEN, S
NOWAK, G
HOFF, AM
SAKTHIVEL, P
AHMED, K
MUKHERJEE, P
WITANACHCHI, S
LAGOWSKI, J
[J]. APPLIED PHYSICS LETTERS, 1994, 65 (11) : 1436 - 1438
[10] STRONG BLUE-LIGHT EMISSION FROM AN OXYGEN-CONTAINING SI FINE-STRUCTURE
MORISAKI, H
HASHIMOTO, H
PING, FW
NOZAWA, H
ONO, H
[J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (04) : 2977 - 2979

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