TITANIUM DIFFUSION INTO LINBO3 USING EXCIMER LASER-BEAM

被引：1

作者：

ALCHALABI, SAM

GOODALL, F

机构：

[1] UNIV LONDON UNIV COLL,DEPT ELECTR & ELECT ENGN,LONDON WC1E 7JE,ENGLAND

[2] RUTHERFORD APPLETON LAB,DIDCOT OX11 0QX,OXON,ENGLAND

来源：

APPLIED SURFACE SCIENCE | 1989年 / 36卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(89)90936-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：408 / 412

页数：5

共 7 条

[1] TITANIUM INCORPORATION INTO LINBO3 USING SCANNED ELECTRON-BEAM ANNEALING [J].

ALCHALABI, SAM ;

BARFOOT, KM ;

WEISS, BL .

MATERIALS LETTERS, 1986, 4 (02) :93-98

[2] OPTICAL-PROPERTIES OF RAPID FURNACE ANNEALED HE+ IMPLANTED LINBO3 WAVE-GUIDES [J].

ALCHALABI, SAM ;

WEISS, BL ;

HOMEWOOD, KP .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (02) :255-258

[3] LOW-LOSS HE-4(+) IMPLANTED LINBO3 WAVE-GUIDE PRODUCED BY TRANSIENT ANNEALING [J].

ALCHALABI, SAM .

APPLIED PHYSICS LETTERS, 1985, 47 (06) :564-566

[4]

ALCHALABI SAM, 1986, RADIAT EFF, V98, P39

[5] TI COMPOUND FORMATION DURING TI DIFFUSION IN LINBO3 [J].

ARMENISE, MN ;

CANALI, C ;

DESARIO, M ;

CARNERA, A ;

MAZZOLDI, P ;

CELOTTI, G .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1982, 5 (02) :212-216

[6] A COMPARATIVE-STUDY OF THE DOPANT PROFILES IN DIFFUSED PLANAR OPTICAL-WAVEGUIDES BY SIMS AND GUIDED WAVE PROBE [J].

BETTS, RA ;

PITT, CW ;

RIDDLE, KR ;

WALPITA, LM .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (01) :29-35

[7] TI DIFFUSION IN TI - LINBO3 PLANAR AND CHANNEL OPTICAL-WAVEGUIDES [J].

BURNS, WK ;

KLEIN, PH ;

WEST, EJ ;

PLEW, LE .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (10) :6175-6182

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