THE NUCLEATION KINETICS OF PLATELIKE OXIDE PRECIPITATES IN CZ-SILICON

被引：1

作者：

JABLONSKI, J

WOJCIECHOWSKI, J

KUCHARSKI, K

机构：

[1] Inst of Electron Technology CEMI, Warsaw, Pol, Inst of Electron Technology CEMI, Warsaw, Pol

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1988年 / 105卷 / 01期

关键词：

D O I：

10.1002/pssa.2211050110

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：113 / 121

页数：9

共 28 条

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