ANALYSIS OF PHOSPHORUS-DIFFUSED LAYERS IN SILICON

被引:17
作者
FAIR, RB
机构
关键词
D O I
10.1149/1.2131438
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:323 / 327
页数:5
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