MECHANISM OF PRODUCTION OF ULTRA-FINE SILICON-CARBIDE POWDER BY ARC PLASMA IRRADIATION OF SILICON BULK IN METHANE-BASED ATMOSPHERES

被引：11

作者：

INOUE, Y ^{[1
]}

NARIKI, Y ^{[1
]}

TANAKA, K ^{[1
]}

机构：

[1] NAGAOKA UNIV TECHNOL,DEPT MECH ENGN,NAGAOKA,NIIGATA 94021,JAPAN

来源：

JOURNAL OF MATERIALS SCIENCE | 1989年 / 24卷 / 11期

关键词：

D O I：

10.1007/BF01168941

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3819 / 3823

页数：5

共 14 条

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[6]

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