EPITAXIAL REGROWTH OF (100) INP LAYERS AMORPHIZED BY ION-IMPLANTATION AT ROOM-TEMPERATURE

被引：37

作者：

AUVRAY, P ^{[1
]}

GUIVARCH, A ^{[1
]}

LHARIDON, H ^{[1
]}

PELOUS, G ^{[1
]}

SALVI, M ^{[1
]}

HENOC, P ^{[1
]}

机构：

[1] CTR NATL ETUD TELECOMMUN,PAB RPC,F-92220 BAGNEUX,FRANCE

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 09期

关键词：

D O I：

10.1063/1.331533

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：6202 / 6207

页数：6

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