ABNORMAL-GLOW-DISCHARGE DEPOSITION OF TUNGSTEN

被引：1

作者：

GREENBERG, KE

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 16期

关键词：

D O I：

10.1063/1.97966

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1050 / 1052

页数：3

共 11 条

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