ON THE DOPING EFFICIENCY OF NITROGEN IN HYDROGENATED AMORPHOUS-GERMANIUM

被引：17

作者：

CHAMBOULEYRON, I

ZANATTA, AR

机构：

[1] Instituto de Física, Universidade Estadual de Campinas, UNICAMP, Campinas, S. P., 13081

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 01期

关键词：

D O I：

10.1063/1.108818

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This letter reports on the doping efficiency of nitrogen in a-Ge:H films of electronic quality. It has been found that nitrogen is an effective dopant in the a-Ge:H network, its doping efficiency being similar to the one corresponding to phosphorus in a-Si:H. The concentration of active nitrogen atoms decreases with impurity content following a square root dependence on total nitrogen. This behavior is similar to the one determined for column V dopants in a-Si:H films of electronic quality.

引用

页码：58 / 60

页数：3

共 11 条

[1] VIBRATIONAL-SPECTRA OF HYDROGEN IN SILICON AND GERMANIUM
CARDONA, M
[J]. PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 118 (02): : 463 - 481
[2] DOPING EFFICIENCY IN RF-SPUTTERED HYDROGENATED AMORPHOUS-SILICON
JOUSSE, D
BRUYERE, JC
BUSTARRET, E
DENEUVILLE, A
[J]. PHILOSOPHICAL MAGAZINE LETTERS, 1987, 55 (01) : 41 - 46
[3] ELECTRONS IN DISORDERED STRUCTURES
MOTT, NF
[J]. ADVANCES IN PHYSICS, 1967, 16 (61) : 49 - +
[4] STRUCTURE OF AMORPHOUS (GE,SI)1-XYX ALLOYS
PHILLIPS, JC
[J]. PHYSICAL REVIEW LETTERS, 1979, 42 (17) : 1151 - 1154
[5] THEORY OF DEFECTS IN AMORPHOUS-SEMICONDUCTORS
ROBERTSON, J
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 37 - 46
[6] ELECTRONIC-STRUCTURE OF SILICON-NITRIDE
ROBERTSON, J
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1991, 63 (01): : 47 - 77
[7] SUBSTITUTIONAL DOPING OF AMORPHOUS SILICON
SPEAR, WE
LECOMBER, PG
[J]. SOLID STATE COMMUNICATIONS, 1975, 17 (09) : 1193 - 1196
[8] STREET RA, 1982, PHYS REV LETT, V49, P1190
[9] THE DOPING EFFICIENCY IN AMORPHOUS-SILICON AND GERMANIUM
STUTZMANN, M
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1986, 53 (01): : L15 - L21
[10] THE EFFECT OF NITROGEN DOPING ON AMORPHOUS-GERMANIUM
TAKANO, Y
SATO, T
KITAOKA, N
OZAKI, H
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 55 (03) : 325 - 333

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