EFFECT OF RESIDUAL-GAS PRESSURE ON THE EPITAXIAL-GROWTH OF VACUUM-DEPOSITED CHROMIUM ON CU(111) SUBSTRATES

被引:13
作者
GAIGHER, HL
VANDERBERG, NG
MALHERBE, JB
机构
[1] Univ of Pretoria, Pretoria, S Afr, Univ of Pretoria, Pretoria, S Afr
关键词
COPPER AND ALLOYS - CRYSTALS - Epitaxial Growth - ELECTRONS - Diffraction - PRESSURE EFFECTS;
D O I
10.1016/0040-6090(86)90035-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Transmission electron microscopy, electron diffraction and Auger electron spectroscopy were used to study the effect of vacuum conditions on the epitaxial growth of vacuum-deposited chromium films of thicknesses less than 40 nm on Cu left brace 111 right brace substrates. The chromium films were condensed (i) in ultrahigh vacuum at 10** minus **9 Torr, (ii) at total pressures of 10** minus **5, 10** minus **6 and 5 multiplied by 10** minus **8 Torr and (iii) at oxygen partial pressures of 5 multiplied by 10** minus **9, 10** minus **7 and 10** minus **6 Torr. The presence of contaminants during the chromium evaporation suppressed the formation of Kurdjumov-Sachs orientations. A low oxygen partial pressure was most effective in altering the orientation and morphology of the deposits.
引用
收藏
页码:337 / 349
页数:13
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