PHYSICAL-PROPERTIES AND STRUCTURE OF CARBON-RICH A-SIC-H FILMS PREPARED BY RF GLOW-DISCHARGE DECOMPOSITION

被引：22

作者：

YAMAMOTO, K ^{[1
]}

ICHIKAWA, Y ^{[1
]}

FUKADA, N ^{[1
]}

NAKAYAMA, T ^{[1
]}

TAWADA, Y ^{[1
]}

机构：

[1] KANEGAFUCHI CHEM IND CO LTD,CENT RES LABS,HYOGO KU,KOBE 652,JAPAN

来源：

THIN SOLID FILMS | 1989年 / 173卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90141-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：253 / 262

页数：10

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