UNIFORM POLYMER COATING TECHNIQUE FOR AN ETCH-BACK PLANARIZATION PROCESS USING LOW-MOLECULAR WEIGHT POLYMERS

被引：18

作者：

GOKAN, H

MUKAINARU, M

ENDO, N

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 04期

关键词：

D O I：

10.1149/1.2095760

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1019 / 1021

页数：3

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