Vacuum arc coatings for tools: Potential and application

被引:76
作者
Vetter, J
机构
[1] METAPLAS Oberflächenveredelungstechnik GmbH, D-51427 Bergisch Gladbach
关键词
cathodic vacuum arc; coating architecture; grain diameter; coating selection; combination coatings;
D O I
10.1016/0257-8972(95)02499-9
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Cathodic vacuum are evaporation is widely used to deposit hard wear-resistant coatings onto tools and machine parts. This paper reviews the potential for deposition of different hard coatings, e.g. MeN, (Me(1), Me(2))N, Me(N, C) in monolayer and multilayer forms as well as in the form of combination coatings. Specific properties of selected coatings are discussed in view of their applications for tools.
引用
收藏
页码:719 / 724
页数:6
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