共 34 条
[2]
Aksenov I. I., 1978, Soviet Physics - Technical Physics, V23, P651
[3]
AKSENOV II, 1978, SOV J PLASMA PHYS, V4, P425
[4]
ANDREEV DA, 1983, Patent No. 3152742
[6]
CATHODIC ARC DEPOSITION OF TIN AND ZR(C,N) AT LOW SUBSTRATE TEMPERATURES USING A PULSED BIAS VOLTAGE
[J].
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING,
1991, 140
:830-837
[7]
ICHARKOV SS, 1978, TRAKT SELKHOZMASHINY, V6, P37
[9]
IKEDA T, 1991, THIN SOLID FILMS, V195, P99, DOI 10.1016/0040-6090(91)90262-V