PULSED-LASER DEPOSITION OF SMOOTH HIGH-T-C SUPERCONDUCTING FILMS USING A SYNCHRONOUS VELOCITY FILTER

被引：59

作者：

PECHEN, EV ^{[1
]}

VARLASHKIN, AV ^{[1
]}

KRASNOSVOBODTSEV, SI ^{[1
]}

BRUNNER, B ^{[1
]}

RENK, KF ^{[1
]}

机构：

[1] RUSSIAN ACAD SCI,PN LEBEDEV PHYS INST,MOSCOW 117924,RUSSIA

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 17期

关键词：

D O I：

10.1063/1.113264

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Pulsed-laser deposition of smooth high-Tc superconducting films almost free from droplets and precipitates with the use of velocity filtration of plasma particles is reported. We have removed droplets from laser-induced pl1sma by using a shutter technique; a reduction of the droplet density by a factor of 105 has been achieved. We have applied the technique to the preparation of high quality YBa2Cu3O7-δ films on (100)-oriented SrTiO3, MgO, Y2O3-stabilized ZrO2 (YSZ) substrates and, furthermore, on (11̄02)-oriented sapphire covered with (100) sublayers of Si and (100) YSZ buffer layers.© 1995 American Institute of Physics.

引用

页码：2292 / 2294

页数：3

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