共 17 条
[4]
CUOMO JJ, 1977, J VAC SCI TECHNOL, V14, P152, DOI 10.1116/1.569109
[5]
INFLUENCE OF SPUTTERING PARAMETERS ON COMPOSITION OF MULTICOMPONENT FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1975, 12 (01)
:79-83
[6]
ESHO S, 1976, AIP C P, V34, P331
[9]
KOBLISKA RJ, 1974, AIP C P, V24, P570