MASS SPECTROMETER FOR STUDY OF SPUTTERING

被引：14

作者：

SMITH, AJ

MICHAEL, J

MARSHALL, DJ

CAMBEY, LA

机构：

来源：

VACUUM | 1964年 / 14卷 / 07期

关键词：

D O I：

10.1016/0042-207X(64)90003-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：263 / &

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