CHARACTERIZATION OF OXIDIZED A-SIHX SURFACES USED IN MIS STRUCTURES

被引：8

作者：

GOLDSTEIN, Y ^{[1
]}

ABELES, B ^{[1
]}

WRONSKI, CR ^{[1
]}

KELEMEN, SR ^{[1
]}

WITZKE, H ^{[1
]}

机构：

[1] EXXON RES & ENGN CO,LINDEN,NJ 07036

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1982年 / 11卷 / 01期

关键词：

D O I：

10.1007/BF02654615

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：191 / 205

页数：15

共 13 条

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