CONTROL OF DIAMOND FILM MICROSTRUCTURE BY USE OF SEEDED FOCUSED ION-BEAM CRATER ARRAYS

被引：4

作者：

KIRKPATRICK, AR ^{[1
]}

WARD, BW ^{[1
]}

机构：

[1] MICRION CORP,PEABODY,MA 01960

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 06期

关键词：

D O I：

10.1116/1.585318

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The nucleation densities associated with diamond growth on some nondiamond substrates are so low that it is possible to employ high resolution methods to define every site at which growth will initiate. A technique has been demonstrated on silicon substrates in which diamond growth is initiated on minute diamond seed particles introduced into patterned arrays of microscopic craters formed by focused ion beam milling. Diamond test films with controlled microstructural properties have been fabricated.

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页码：3095 / 3098

页数：4

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