ANALYSIS OF HE-IMPLANTED LINBO3 BY ELASTIC RECOIL DETECTION

被引：2

作者：

ALCHALABI, SAM

WEISS, BL

BARFOOT, KM

ARNOLD, GW

机构：

[1] UNIV SURREY,DEPT ELECTR & ELECT ENGN,GUILDFORD GU2 5XH,SURREY,ENGLAND

[2] SANDIA NATL LABS,ALBUQUERQUE,NM 87185

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 04期

关键词：

D O I：

10.1063/1.340002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1032 / 1036

页数：5

共 19 条

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