PREPARATION OF YTTRIA-STABILIZED ZIRCONIA THIN-FILMS BY A SOL-GEL PROCEDURE USING ALKOXIDE PRECURSORS

被引：23

作者：

PESHEV, P

SLAVOVA, V

机构：

[1] Institute of General and Inorganic Chemistry, Bulgarian Academy of Sciences

来源：

MATERIALS RESEARCH BULLETIN | 1992年 / 27卷 / 11期

关键词：

ZIRCONIA; YTTRIA; PROPOXIDES; SILICON; ISOPROPOXIDES; SAPPHIRE; SILICA; ALUMINA; GLASSES; CERAMICS;

D O I：

10.1016/0025-5408(92)90091-D

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The preparation by a chemical method of thin yttria-stabilized zirconia (YSZ) films on substrates of single crystalline silicon and sapphire, optical silica glass and alumina ceramics has been investigated. A sol-gel procedure is used during which an isopropanol sol of Zr-propoxide and Y-isopropoxide along with ethyl aceto-acetate as a chelating agent and an equivalent amount of water is spin coated on the substrate. Well crystallized YSZ films are formed on the substrates after heat-treatment of the amorphous gel coatings. These films, having a thickness of 1200-1500 angstrom, are characterized by a very good adhesion to the substrate, the lack of cracks and, especially on silicon and silica glass substrates a ver smooth surface.

引用

页码：1269 / 1275

页数：7

共 21 条

[1]

Bratton RJ, 1981, ADV CERAM, P226

[2] TRANSPARENT ZIRCONIA GEL-MONOLITH FROM ZIRCONIUM ALKOXIDE [J].