OPTICAL-WAVEGUIDES FABRICATED BY ION-IMPLANTATION

被引：15

作者：

NAMBA, S

ARITOME, H

NISHIMURA, T

MASUDA, K

TOYODA, K

机构：

[1] OSAKA UNIV, FAC ENGN SCI, TOYONAKA, OSAKA, JAPAN

[2] INST PHYS & CHEM RES, WAKO, SAITAMA, JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期

关键词：

D O I：

10.1116/1.1318519

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：936 / 940

页数：5

共 18 条

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