OPTICAL-STANDARD SURFACES OF SINGLE-CRYSTAL SILICON FOR CALIBRATING ELLIPSOMETERS AND REFLECTOMETERS

被引:79
作者
YASUDA, T
ASPNES, DE
机构
[1] North Carolina State Univ, Raleigh, United States
来源
APPLIED OPTICS | 1994年 / 33卷 / 31期
关键词
D O I
10.1364/AO.33.007435
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We show that hydrogen-terminated (111) Si wafers prepared with NH4F-based treatments can serve as a calibration standard for ellipsometers and reflectometers.
引用
收藏
页码:7435 / 7438
页数:4
相关论文
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