DIFFERENT ETCH PIT SHAPES REVEALED BY MOLTEN KOH ETCHING ON THE (001) GAAS SURFACE AND THEIR DEPENDENCE ON THE BURGERS VECTORS

被引：5

作者：

ISHIDA, K ^{[1
]}

KAWANO, H ^{[1
]}

机构：

[1] NIPPON ELECT CO LTD,OPTOELECTR RES LAB,MIYAMAE KU,KAWASAKI 213,JAPAN

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 98卷 / 01期

关键词：

D O I：

10.1002/pssa.2210980119

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：175 / 181

页数：7

共 6 条

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GRABMAIER, JG ;

WATSON, CB .

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ISHIDA, K ;

KAMEJIMA, T .

[3] ETCH PIT OBSERVATION OF VERY THIN [001]-GAAS LAYER BY MOLTEN KOH [J].

ISHII, M ;

HIRANO, R ;

KAN, H ;

ITO, A .

[4]

Kawano H., UNPUB

PETROFF, P ;

HARTMAN, RL .

[6] DISLOCATIONS IN VAPOR-PHASE EPITAXIAL GAP [J].

STRINGFELLOW, GB ;

LINDQUIST, PF ;

CASS, TR ;

BURMEISTER, RA .