MICROWAVE PLASMA SOURCE FOR REMOTE LOW-ENERGY ION STREAM

被引：5

作者：

POPOV, OA

HALE, W

WESTNER, AO

机构：

[1] Microscience, Inc., Norwell

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期

关键词：

D O I：

10.1063/1.1141328

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A plasma source capable of delivering a narrow (2 to 3-in. diameter), low ion energy (10-30 eV), plasma stream has been designed and tested. Microwave plasmas were excited in a 3-in.-diam chamber by cw electromagnetic waves (2.45 GHz, 200-1000 W) in the presence of static axial magnetic fields of 875-930 G. Plasma was delivered to the sample via a 12-in.-long, 2-in.-diam-metal tube. Ion current densities of several hundred μA/cm2 at gas pressures 1-3×10-4 Torr (N2, Xe) were achieved at distances of 15-16 in. from the source output.

引用

页码：300 / 302

页数：3

共 9 条

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[2] PLASMA ACCELERATION WITH MICROWAVES NEAR CYCLOTRON RESONANCE [J].