Recent developments in secondary electron imaging

被引:65
作者
Howie, A
机构
[1] Cavendish Laboratory, Cambridge, CB3 0HE, Madingley Road
来源
JOURNAL OF MICROSCOPY-OXFORD | 1995年 / 180卷
关键词
secondary emissions; coincidence detection; escape depth; work function;
D O I
10.1111/j.1365-2818.1995.tb03678.x
中图分类号
TH742 [显微镜];
学科分类号
摘要
Some recent experimental and theoretical developments in secondary electron (SE) imaging are reviewed. Coincidence experiments identify inner-shell excitations and single electron valence excitations often as more significant initial events in SE production than the more delocalized process of plasmon generation. Quantitative measurement and interpretation of escape depths in different materials are now becoming possible. Local variations in surface barrier height or work function can be imaged, e.g. at p-n junctions in semiconductors, especially if the effects of external patch fields are overcome.
引用
收藏
页码:192 / 203
页数:12
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