PROPERTIES OF SN-DOPED IN2O3 BY REACTIVE MAGNETRON SPUTTERING AND SUBSEQUENT ANNEALING

被引：35

作者：

YAMAMOTO, S

YAMANAKA, T

UEDA, Z

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574889

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

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页码：1952 / 1955

页数：4

相关论文

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