THE DECONVOLUTION OF SPUTTER-ETCHING SURFACE CONCENTRATION MEASUREMENTS TO DETERMINE IMPURITY DEPTH PROFILES

被引：5

作者：

CARTER, G

KATARDJIEV, IV

NOBES, MJ

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 09期

关键词：

D O I：

10.1002/sia.740140905

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：511 / 523

页数：13

共 19 条

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