DIRECT WRITING OF AG-LINES ON MN-ZN FERRITE BY LASER-INDUCED THERMAL-DECOMPOSITION BY CH3COOAG

被引：25

作者：

LU, YF ^{[1
]}

TAKAI, M ^{[1
]}

NAGATOMO, S ^{[1
]}

KATO, K ^{[1
]}

NAMBA, S ^{[1
]}

机构：

[1] OSAKA UNIV, EXTREME MAT RES CTR, TOYONAKA, OSAKA 560, JAPAN

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1992年 / 54卷 / 01期

关键词：

D O I：

10.1007/BF00348130

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Laser-induced direct writing of silver lines on a ferrite surface from a silver acetate (CH3COOAg) thin layer has been investigated. The deposition is a thermochemical process and the threshold temperature for thermal decomposition of CH3COOAg is about 380-degrees-C. About 100% of Ag in the deposited lines has been achieved. The width of the deposited Ag-lines increased with the increase in laser power, and it can be accurately estimated by the temperature profile induced by laser irradiation within the power region below the melting point of ferrite. A line thickness of micron order can be formed both on a ferrite surface and on a deposited SiO2 surface, whereas the line width decreased with the increase in beam dwell time due to the vaporization of both CH3COOAg precursor and deposited Ag material.

引用

页码：51 / 56

页数：6

共 29 条

[1] LASER-INDUCED COPPER PLATING [J].

ALSUFI, AK ;

EICHLER, HJ ;

SALK, J ;

RIEDEL, HJ .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) :3629-3631

[2]

BAUERLE D, 1984, SPRINGER SERIES CHEM, V39

[3]

BAUERLE D, 1986, SPRINGER SERIES MATE, V1

[4] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF ALUMINUM [J].

BAUM, TH ;

LARSON, CE ;

JACKSON, RL .

APPLIED PHYSICS LETTERS, 1989, 55 (12) :1264-1266

[5] SUPPLEMENTAL MULTILEVEL INTERCONNECTS BY LASER DIRECT WRITING - APPLICATION TO GAAS DIGITAL INTEGRATED-CIRCUITS [J].

BLACK, JG ;

DORAN, SP ;

ROTHSCHILD, M ;

EHRLICH, DJ .

APPLIED PHYSICS LETTERS, 1987, 50 (15) :1016-1018

[6] GROWTH-RATES AND ELECTRICAL-CONDUCTIVITY OF MICROSCOPIC OHMIC CONTACTS FABRICATED BY LASER CHEMICAL VAPOR-DEPOSITION OF PLATINUM [J].

BRAICHOTTE, D ;

VANDENBERGH, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 44 (04) :353-359

[7] GAS-PHASE VERSUS SURFACE CONTRIBUTIONS TO PHOTOLYTIC LASER CHEMICAL VAPOR-DEPOSITION RATES [J].

BRAICHOTTE, D ;

VANDENBERGH, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04) :337-343

[8] TEMPERATURE EFFECTS IN THE PHOTOLYTIC LCVD OF PLATINUM [J].

BRAICHOTTE, D ;

VANDENBERGH, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 49 (02) :189-197

[9] THERMODIFFUSIONAL INSTABILITY AND POTENTIAL DISTRIBUTION IN LASER-HEATED ABSORBING ELECTROLYTES [J].

BUNKIN, NF ;

DMITRIYEV, AK ;

LUKYANCHUK, BS ;

SHAFEEV, GA ;

SZORENYI, T .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (03) :159-162

[10]

Ehrlich D.J., 1989, LASER MICROFABRICATI

← 1 2 3 →