MICROOPTICS, A KEY TECHNOLOGY IN THE RACE TO MICROSYSTEMS

被引：12

作者：

VALETTE, S

机构：

[1] LETI (CEA -Technologies Avancees), CEN/G, 38054 Grenoble Cedex 9

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1995年 / 5卷 / 02期

关键词：

D O I：

10.1088/0960-1317/5/2/005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper I would like to present the recent progress in the field of micro-optics including miniaturized light sources, bulk and planar optical components and the key role played by miniaturized optomechanical devices in the general development of future optical microsystems.

引用

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页码：74 / 76

页数：3

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