HEAVILY SI-DOPED GAAS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引:24
作者
FURUHATA, N
KAKIMOTO, K
YOSHIDA, M
KAMEJIMA, T
机构
[1] NEC CORP, FUNDAMENTAL RES LABS, MIYAMAE KU, KAWASAKI, KANAGAWA 213, JAPAN
[2] NEC CORP, RESOURCE & ENVIRONM PROTECT RES LABS, MIYAMAE KU, KAWASAKI, KANAGAWA 213, JAPAN
关键词
D O I
10.1063/1.341253
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4692 / 4695
页数:4
相关论文
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