ANODIC OXIDATION OF SILICON NITRIDE FILMS ON SILICON

被引：9

作者：

TRIPP, TB

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 02期

关键词：

D O I：

10.1149/1.2407457

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：157 / &

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[5] STRUCTURAL EVALUATION OF SILICON OXIDE FILMS
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[7] CONVERSION OF SILICON NITRIDE FILMS TO ANODIC SIO2
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[8] ANODIC FORMATION OF OXIDE FILMS ON SILICON
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[9] SCHMIDT PF, PRIVITE COMMUNICATIO