CORRECTION FOR NONLINEARITY AND POLARIZATION-DEPENDENT SENSITIVITY IN THE DETECTION SYSTEM OF ROTATING ANALYZER ELLIPSOMETERS

被引：21

作者：

RUSSEV, SH

机构：

来源：

APPLIED OPTICS | 1989年 / 28卷 / 08期

关键词：

D O I：

10.1364/AO.28.001504

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

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页码：1504 / 1507

页数：4

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