EFFECTS OF DETECTOR NONLINEARITY ON CALIBRATION AND DATA REDUCTION OF ROTATING-ANALYZER ELLIPSOMETERS

被引:6
作者
HUNTER, WR [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1364/JOSA.66.000094
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:94 / 97
页数:4
相关论文
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